PI Oven<\/p>\n

Application and General Requirement<\/strong><\/p>\n

The system is mainly used for flexible substrate Polyimide curing process. This system is required to be reasonable in design, with advanced technology to ensure the system an excellent kinetic performance. The action elements selected for the control system shall be of high accuracy, good reliability and rapid response. The machine shall be convenient for use, operation and maintenance, be artistic in configuration, compact in structure, stable in performance and satisfactory in after-sale service.<\/p>\n

Requirements, main specifications and parameters of the Equipment<\/p>\n

The design and manufacturing of this machine shall be in compliance with related standards.<\/p>\n

International unit standards (SI) should be adopted for the denominations of all elements, parts and various instruments of this equipment.<\/p>\n

Application and General Requirement:<\/p>\n

The system is mainly used for flexible substrate Polyimide curing process in flexible OLED process<\/p>\n

Specification\uff1aNo mura caused by PI oven process be found after lighting on(Module).<\/strong><\/p>\n

There must be no mura caused by M\/C.<\/p>\n

The mura, which include two types:<\/p>\n

1. It could found by eyes or mura inspection equipment ,<\/p>\n

2. It could cause pattern displaying abnormal.<\/p>\n

Especially Pin mura can't be found.<\/p>\n

Especially bubble mura can't be found.<\/p>\n

Inspection condition:<\/p>\n

Glass\uff1aall types of mass process glass<\/p>\n

Inspection equipment\uff1amacro scope Inspection equipment (mac\/mic) & inline macro.<\/p>\n

Warpage<\/p>\n

Specification\uff1a\u2264300um(glass with dry film,10um(vender: Kaneka, UBE, Toray)<\/p>\n

Particle<\/p>\n

Cleanliness class of internal chamber.<\/p>\n

Spec\uff1aBOE class 10: \u2265 0.3um\/ft3 10ea;\u22650.5um\/ft3 3ea;\u22651 um\/ft3 1ea (refer to BOECD common spec\uff0cno glass condition)<\/p>\n

Temperature specification<\/strong><\/p>\n

BOE standard recipe specification\uff1a<\/p>\n

Within glass : temp profile: 120\u2103->180\u2103->350\u2103->500\u2103->120\u2103Max Temp:550\u2103Ramp up \u2264\u00b15\u2103Cool down\u2264\u00b125\u2103Dwell\u2264\u00b12\u2103<\/p>\n

Glass to glass (point to point) : temp profile: 120\u2103->180\u2103->350\u2103->500\u2103->120\u2103Max Temp:550\u2103Ramp up \u2264\u00b15\u2103Cool down\u2264\u00b130\u2103Dwell\u2264\u00b13\u2103<\/p>\n

Chamber to chamber (point to point) :temp profile: 120\u2103->180\u2103->350\u2103->500\u2103->120\u2103Max Temp:550\u2103Ramp up \u2264\u00b15\u2103Cool down\u2264\u00b130\u2103Dwell\u2264\u00b13\u2103<\/p>\n

Chamber temperature should be display on the main PC<\/p>\n

<\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n

<\/p>\n

Vivi
\n lbt@lbt.tw<\/p>\n","protected":false},"excerpt":{"rendered":"